ࡱ> EGDU R bjbjnnB(aa d d 8;,g4''$L(&&&&&&&$K),4&-&4&sss^&s&ss6r$%PP\^_|R%z&&0''n%@5,5,8%5,%s&&]''5,d Q : ^S'ir Ty~MnS;Nb/gSpepeϑpeϑ USMO1wzz|~T4lQ:gN0;NMn 1.RP[l:g~NWY 2.[6R4lQ:gNWY 3.[6RwzzhQMNNWY Twzz|~v9SM0 N0;Nb/gchSSpeN NSpe:N_{nvgNOMn bhNTAQckOPy 1.RP[lbN2:250GS/y He: 255GS/y,H2: 220GS/y,Ar: 250GS/y 2.RP[lvgPwzz:<1x10-10mbar 3.S)k >1x1011 N2 1.5x106H2 4.l60000rpm1010Hz qRs 5./TRe:<3R &^2bQ 6.jV<50dB( 1s|Y) 7.c6RhVg'YeQRs300VA Qs963Hz, &^RS232/485cS 8.MR~:Nr^l b12.8m3/h, gPwzz1.3x10-2mbar,&^ jV<52dB os<1x10-6 cc/second Helium 9.hQϑ zĉ{ KmϑV5x10-9 0R1000mbar &^MWY5u~ ǏRP[lc6RhV>f:ywzzpe 10.  (*.046:<>BRTVXdvx˿⸨{snsnsns{gZhVhV5B*ph hV5o( hVo(hw*hVo(hw*hV5hw*hV5o(hXhVCJQJaJo(hVCJOJQJaJo(hXhVCJOJQJaJo( hXhVhXhV5CJaJhXhV5QJaJhV5OJQJaJhXhV5OJQJaJhXhV5OJQJaJo(! *06< $Ifgd$a<>BTdzKBBB66 d$Ifgdjt $Ifgd$akd$$Ifl.rvr!p#5&S0)44 laytV z  @ ` P D~Brt d$IfgdVd$7$8$H$Ifgd!xd$7$8$H$IfgdV$d$1$Ifa$gdV $Ifgd$a d$Ifgdjt    z ~  " * 0 > @ B D H X \ ` ï×××ÅtbttbtbtTbtbthjtKHOJQJ^JaJ#h~!hVKHOJQJ^JaJo( h~!hVKHOJQJ^JaJ#h~!hVKHOJQJ^JaJo(/h~!hVB*H*KHOJQJ^JaJo(ph&hjtB*KHOJQJ^JaJo(ph,h~!hVB*KHOJQJ^JaJo(phhw*hV5o(hVhV5B*phhVhV5B*o(ph ` b d x    ( . R T ` b l t x z | BͼͼͼͼͼͼͼͼͼͼͼkiU&hjtB*KHOJQJ^JaJo(ph,h~!hVB*KHOJQJ^JaJo(ph&h~!hVH*KHOJQJ^JaJo(#h~!hVH*KHOJQJ^JaJ h~!hVKHOJQJ^JaJ#h~!hVKHOJQJ^JaJo(hjtKHOJQJ^JaJ#h~!hVKHOJQJ^JaJo((ĉ{QOS5uSV00R10.5V KmϑV1.820R8.6V 11.[6R_s4lQ:g RSOΘQ 6RQRs N\N12KW 12.c)nV5-35C 4l{[y140GS eQRs5.9KW Amϑ10-110GS/R 4lS0.10R0.55MPa0 13._s4lQ:gcOhQWYvyrk{~Tc4Y O|~SNck8^]\O 14.wzzMWYޏcNNWY S+TCF100-CF35Ǐ!nTN*N ZPbCF100/CF35/CF35 Nb__0vQNMNSbKF25l~{ aS{ vg WGr0vQNyrk[6Rvlc4YTޏc{~I{0 15.wzzMWYޏcN_{cO cgqwzz|~yrk[6Rvlc4YTޏc{~ OTwzz|~v9SM TecOYvYN0 N0WT(O 1.OOgNhV6eNT1t^ꁌ6eT&Ŝ]6ҨN=Ina7qb&>!"h [+Lxz)WVOg%Ţ|8Mă#/8'=QU*C`CW{D6/[YL%+n+{\osM/~iBcAX/=x E'5&\h4da,yE\})laR^*zyV-WoWZN]:mV=tCWrb*IVURU|nc`|*^PK! ѐ'theme/theme/_rels/themeManager.xml.relsM 0wooӺ&݈Э5 6?$Q ,.aic21h:qm@RN;d`o7gK(M&$R(.1r'JЊT8V"AȻHu}|$b{P8g/]QAsم(#L[PK-![Content_Types].xmlPK-!֧6 0_rels/.relsPK-!kytheme/theme/themeManager.xmlPK-!ftheme/theme/theme1.xmlPK-! ѐ' theme/theme/_rels/themeManager.xml.relsPK] %( ` Bb  <t  @ @H 0(  0(  B S  ? _Hlk365288903 OLE_LINK3 OLE_LINK4 OLE_LINK5 OLE_LINK6 OLE_LINK1 OLE_LINK2 OLE_LINK9_GoBack !)49?AJLcd "$,.2<AFMNWY\dns"'+,-.5;CJKLOUV]^b$./U&)AD^dg!33s3s3ss *^_ |2\ }t~r5b$#P,jWlmPJOnF"Qn7x0 VD WD8^`. TTVDXWD8^T`. VDWD8^`.   VDWD8^ `. VD WD8^`OJQJo(l TTVDXWD8^T`OJQJo(l VDWD8^`OJQJo(l   VDWD8^ `OJQJo(lhhWD8^h`. hhWD8^h`OJQJo(lhh^h`5o(H\H^H`\)\^`\.\^`\.4\4^4`\) \ ^ `\.| \| ^| `\. \ ^ `\)\^`\. Qn7~}| x4z        -ak Ou`ry3m1\9G>yDW$Y,Z$aQ)fsqjtN|Q }U$'%73Rl;;m!xV00a"<E-6 hW a@ AAAA((( (Unknown G*Ax Times New Roman5Symbol3. *Cx Arial;([SOSimSun;5 N[_GB23127.@ Calibri?= *Cx Courier New;WingdingsA$BCambria Math heDGz]UENN!?!%),.:;>?]}    & 0 2 3 : !6"000 0 0 0000006:>@DZ\^ =@\]^$([{  0 0 000000Y[];[zz 3qHX $P,Z2!xx0 DNLHB8         Oh+'0h  $ 0 <HPX` Normal.dotmLHB18Microsoft Office Word@ޡ @,Ŕ@d^N՜.+,0 X`lt|    !"#$%&'()*+,-./012356789:;=>?@ABCFRoot Entry FPP\^HData 1Tablem,WordDocumentB(SummaryInformation(4DocumentSummaryInformation8<CompObjn  FMicrosoft Word 97-2003 ĵ MSWordDocWord.Document.89q